Patent holdings for IPC class H01J 37/31

Total number of patents in this class: 108

10-year publication summary

10
11
10
9
13
18
11
12
6
1
2015 2016 2017 2018 2019 2020 2021 2022 2023 2024

Principal owners for this class

Owner
All patents
This class
FEI Company
851
12
NuFlare Technology, Inc.
770
8
Hitachi High-Tech Corporation
4424
7
Hitachi High-Tech Science Corporation
326
6
Taiwan Semiconductor Manufacturing Company, Ltd.
36809
4
Varian Semiconductor Equipment Associates, Inc.
1282
3
ASML Netherlands B.V.
6816
3
Carl Zeiss Microscopy GmbH
1146
3
Gatan, Inc.
111
3
JEOL Ltd.
556
3
Tel Manufacturing and Engineering of America, Inc.
150
3
Hon Hai Precision Industry Co., Ltd.
4157
2
Applied Materials, Inc.
16587
2
Applied Materials Israel, Ltd.
549
2
Board of Regents, The University of Texas System
5370
2
Tsinghua University
5426
2
Axcelis Technologies, Inc.
429
2
NexGen Semi Holding, Inc.
21
2
Techinsights Inc.
92
2
Shanghai Huali Integrated Circuit Corporation
136
2
Other owners 35